\section{Introduction}
Over the last two decades, nanopore technology has developed into a versatile platform for a wide range of applications such as ultrafiltration, bio- and medical sensing, nanofluidics and nano-electronic devices.\cite{Dekker2007,Ahn2014,Zhou2017,Lemay2009,Venkatesan2011,Luan2019} With the advent of solid state nanopore membranes some limitations of biological nanopores can be overcome. Solid state nanopores are more robust and durable under harsh conditions such as elevated temperature, extreme pH environments and high pressure. They are highly tunable in geometry and surface properties and thus enable novel applications. Examples include filtration of water to remove contaminants such as oil\cite{Gao2014} and dyes,\cite{Li2020} nanopore sensors for specific ions,\cite{Liu2015} single molecules,\cite{Howorka2009} proteins,\cite{Houghtaling2018} gases,\cite{Xu2015} biochemicals,\cite{Aramesh2020} blood sugar,\cite{Galenkamp2018} and drugs,\cite{Wang2018} as well as nucleic acid analysis\cite{Tang2019}, DNA\cite{Wang2021a} and protein sequencing.\cite{Yu2019a} The potential of using nanofluidic devices based on nanopore membranes for novel applications such as power generation\cite{Laucirica2021} and electroosmotic pumps\cite{Wu2016} have also been explored in detail.

Solid state nanopore membranes can be manufactured in a wide range of materials such as semiconductors,\cite{Li2001,Storm2003,Kluth2008b,DeGroot2013,Karmi2020} polymers,\cite{ToimilMolares2001,Fink2,Li2004,Kiy2021} alumina\cite{Yuan2004,Nalaparaju2019}, carbon,\cite{Kang2014} and \ch{MoS2}\cite{Ke2019} with only a single\cite{Chtanko2004,Zhang2021} or multiple\cite{Harrell2006,Scopece2006} pores depending on the material and fabrication technique. One major challenge in current nanopore technology is to combine the high throughput rates that nanopores in ultrathin membranes provide with highly asymmetric transport properties characteristic of long, conical nanopores.\cite{PerezSirkin2020,Tang2016,Ulrich2021} Furthermore, translating the performance of single pores to multipore systems without losing performance has proven to be challenging.\cite{Cao2018,Laucirica2021}

Different techniques like e-beam lithography,\cite{Deshmukh1999} ion beam sculpting,\cite{Li2001} e-beam drilling using a transmission electron microscope,\cite{VanDenHout2011} focused ion beam drilling,\cite{Tang2014} dielectric breakdown\cite{Goto2019} or laser-assisted pulling\cite{Cadinu2020} can only be used to fabricate a single or few nanopores and thus lack the scalability that many applications require. Additionally, these techniques do not allow to precisely shape the geometry of the pores. Ion track etching has been shown to create versatile conical nanopores in polymers\cite{Li2004,Wharton2007} and silicon nitride\cite{Vlassiouk2009} in a way that is industrially scalable. In this work, we present a system of conical nanopores in thin amorphous \ch{SiO2} (a-\ch{SiO2}) membranes fabricated using ion track etching. Our membranes feature conical nanopores that exhibit opening angles far greater than those in track etched polymers,\cite{Kaya2016,Hadley2020} while being an order of magnitude thinner. We are able to either manufacture single pores or multipores with adjustable pore density on large areas. As a-\ch{SiO2} is widely used in the semiconductor industry, the fabrication techniques are precise and cost efficient, and can be readily integrated in lab-on-a-chip devices.

Here, we present the fabrication of multipore membranes, and the detailed characterisation of the structure and ionic transport properties. The performance is compared to that of existing nanopore membranes.

\section{Experimental}
\subsection{a-\ch{SiO2} membrane fabrication}
Figure~\ref{f:fab} shows the workflow involved in the fabrication of free-standing silicon dioxide membranes. Double side polished <100> Silicon wafers of \SI{100}{\mm} diameter with \SI{1}{\um} wet thermal silicon dioxide were purchased from WaferPro, LLC (USA) (i). The wafers were then RCA cleaned before being spin-coated with a thin coating of TI prime (Microchemicals, GmbH) for 25 seconds at \SI{3000}{\text{rpm}} which acts as an adhesion promoter. On the backside of the wafer, negative photoresist maN-1420 (Microchemicals, GmbH) was spin-coated for \SI{30}{\second} at \SI{3000}{\text{rpm}} (ii). After that, UV lithography was used to pattern custom windows measuring $475\times\SI{475}{\um\tothe{2}}$ (iii). The silicon was then exposed in the customised window region by removing the a-\ch{SiO2} layer using reactive ion etching from the backside of the wafer (iv). The photoresist was removed and the exposed \ch{Si} was then anisotropically etched using a wet etching solution containing \SI{5}{\%} tetramethylammonium hydroxide (TMAH) (Sigma-Aldrich, 331635) which leads to the formation of free-standing membranes (v). TMAH has a higher selectivity of a-\ch{SiO2}/\ch{Si} than other etchants like potassium hydroxide, and the exposed \ch{Si} can be completely etched without the need for extra silicon nitride layers. The membranes were then RCA cleaned to eliminate any contaminants they may have acquired during the process.  On a \SI{100}{\mm} Si wafer, this method results in the creation of 220 free-standing a-\ch{SiO2} membranes with a frame size of $5.6\times\SI{5.6}{\mm\tothe{2}}$ and a window size of $55\times\SI{66}{\um\tothe{2}}$.
\begin{figure}
	\centering
	\includegraphics{fab.png}
	\caption{Fabrication process of free standing a-\ch{SiO2} membranes.}
	\label{f:fab}
\end{figure}

\subsection{Ion transport measurements}
All electrolyte solutions were prepared using demonised water (\SI{18.2}{\mega\ohm\cm}, arium\textsuperscript{\textregistered} mini Sartorius ultrapure water system). Potassium chloride (\ch{KCl}) was obtained from Thermo Fisher Scientific ($\ge\SI{99.8}{\percent}$, catalog number: AJA383-500). The pH of the solutions was adjusted using potassium hydroxide ($\ge\SI{85.0}{\percent}$, ChemSupply Australia, product code: PA161-500G) and hydrochloric acid (\SI{36}{\percent}, Thermo Fisher Scientific, catalogue number: R18601E). The pH and conductivity of the electrolyte were measured using an Orion Star\texttrademark A215 pH/Conductivity Benchtop Multiparameter Meter from Thermo Fisher Scientific.
\begin{figure}
	\centering
	\includegraphics[width=8.3cm]{setup_picture.png}
	\caption{The custom-built setup used for conductometric experiments. The membrane is sealed between two fluid compartments. Using electrodes on either side of the membrane a bias voltage can be applied and the ionic current measured. The entire setup is enclosed in a stainless steel Faraday cage.}
	\label{f:setup_picture}
\end{figure}

The current measurements were performed in a custom-built setup that features two Teflon cells that hold a liquid volume of \SI{730}{\ul} each (see Figure~\ref{f:setup_picture}). The nanopore membrane is sealed between two silicone gaskets and the Teflon cells, which are filled with the electrolyte. \ch{Ag}/\ch{AgCl} electrodes were fabricated by the reaction of silver wires ($\varnothing$\SI{1}{\mm}) and sodium hypochlorite (\SI{10}{\percent}, Sigma-Aldrich) and placed in the liquid on either side of the membrane. The Teflon cells are enclosed in a stainless steel Faraday cage. The current-voltage ($I-V$) curves were recorded using a Moku:Lab (Liquid Instruments) connected to a custom-built voltage amplifier with a gain of \SI{e6}{\V\V\tothe{-1}}. The voltage sweep was started at \SI{0}{\V}, ramped up to \SI{1}{\V}, reduced to \SI{-1}{\V} and returned to \SI{0}{\V} with a sweep rate of \SI{200}{\mV\s\tothe{-1}}. This cycle was repeated until a stable current was reached, as the membrane has to adjust to the electrolyte. Each measurement was repeated twice, and the membrane was rinsed with demonised water in between.

\subsection{Theoretical background}
The total conductance of a membrane $G\ind{m}$ with $n$ conical nanopores is the sum of the conductance of each individual nanopore $G\ind{p}$, given by $G\ind{m}=\sum_n G\ind{p}=n G\ind{p}$. As the average distance between pores is on the order of \SI{10}{\um}, inter-pore effects can be neglected.\cite{Cao2018} The pore conductance consists of the bulk conductance $G\ind{b}$, the surface conductance $G\ind{s}$, and the access resistance at the cone tip $R\ind{a,t}$ and base $R\ind{a,b}$:\cite{Hall1975,Lee2012}
\begin{equation}
    G\ind{m}=n\left(\frac{1}{G\ind{b}+G\ind{s}}+R\ind{a,t}+R\ind{a,b}\right)^{-1}\label{eq:cond}
\end{equation}

As charged conical nanopores often exhibit asymmetric transport properties between positive and negative applied voltage, we analysed the conductance $G_0$ in the vicinity of \SI{0}{\V} where it is largely linear in a small bias interval. We determined the conductance in the linear regime of the $I-V$ curve around \SI{0}{\V} between \SIlist{-.1;.1}{\V}. The different contributions are:\cite{Frament2012}
\begin{align}
    G_{\text{b},0}&=\kappa\ind{b}\frac{\pi r\ind{t} r\ind{b}}{L}\\
    G_{\text{s},0}&=\kappa\ind{b}\frac{r\ind{b}-r\ind{t}}{\ln\left(\frac{r\ind{b}}{r\ind{t}}\right)}\frac{\pi}{L}\frac{\left|\sigma\right|}{e c}
\end{align}
where $\kappa\ind{b}$ is the bulk conductivity, $e$ is the elementary charge, $c$ is the salt concentration, $r\ind{t}$ is the radius at the cone tip, $r\ind{b}$ is the radius at the cone base, $L$ is the pore length, $\sigma$ is the surface charge density, and $\text{Du}_i=\left|\sigma\right|/(e c r_i)$ is the Dukhin number at the pore orifices.

The access resistance according to Hall is given by\cite{Hall1975,Lee2012}
\begin{equation}
    R_{\text{a},i}=\frac{1}{\kappa\ind{b} r_i}\frac{1}{4+\text{Du}_i}
\end{equation}
and describes the rate at which the ions pass into and out of the nanopore at the cone tip and base.

In a-\ch{SiO2} nanopores, the surface charge is regulated by protonation and deprotonation reactions of silanol (\ch{SiOH}) groups at the pore surface that can render the surface negatively or positively charged:\cite{Yang2020}
\begin{align*}
    \ch{SiOH &<=>[$K\ind{a}$] SiO- + H+}\\
    \ch{SiOH + H+ &<=>[$K\ind{b}$] SiOH2+}
\end{align*}
with the acid and base dissociation constants $K\ind{a}$ and $K\ind{b}$ that are related to the $\text{p}K_i$ of the surface $K_i=10^{-\text{p}K_i}$. The surface charge density $\sigma$ is controlled by the local $\zeta$-potential:\cite{Smeets2006,Frament2012}
\begin{align}
    \zeta(\sigma)=-\frac{k\ind{B}T}{e}\ln\left(\frac{\sigma(\zeta)}{e\Gamma+\sigma(\zeta)}\right)+\frac{k\ind{B}T\ln10}{e}(\text{pH}-\text{p}K\ind{a})-\frac{\sigma(\zeta)}{C}\label{eq:sig1}
\end{align}
with the Boltzmann constant $k\ind{B}$ and the temperature $T=\SI{22}{\degree C}$, the surface density of chargeable sites $\Gamma=\SI{8}{\nm\tothe{-2}}$,\cite{Iler2,Hiemstra1989,Behrens2001} and the Stern layer capacitance $C=\SI{2.9}{\F\m\tothe{-2}}$.\cite{Hiemstra1989,Behrens2001} The terms $-\ln\left(\sigma/(e\Gamma+\sigma)\right)$ and $(\text{pH}-\text{p}K\ind{a})$ are only valid for negatively charged surfaces and are replaced by $\ln\left((e\Gamma-\sigma)/\sigma\right)$ and $(\text{p}K\ind{b}-\text{pH})$ if the surface charge becomes positive, i.e. below the isoelectric point pI at which the surface carries no net charge.\cite{Frament2013}

The surface charge density can be calculated using the planar Graham equation, if the electrical double layer (EDL) is not overlapping.\cite{Behrens2001,VanDerHeyden2005,Israelachvili2} This is valid if the Debye length is smaller than the pore tip radius, which is the case for every electrolyte concentration except two, as shown in Table~\ref{t:debye}. The surface charge density is then given as:
\begin{equation}
    \sigma(\zeta) = \frac{2\varepsilon\varepsilon_0}{\lambda\ind{D}}\frac{k\ind{B}T}{e}\sinh{\left(\frac{e\zeta(\sigma)}{2k\ind{B}T}\right)}\label{eq:sig2}
\end{equation}
with the permittivity of the liquid $\varepsilon=80.2$, the vacuum permittivity $\varepsilon_0$ and the Debye length $\lambda\ind{D}=\sqrt{\sum_i\varepsilon\varepsilon_0k\ind{B}T/e^2c_iz_i}$. $c_i$ and $z_i$ are the concentration and charge of the ionic species \ch{K+}, \ch{Cl-}, \ch{H+} and \ch{OH-}, respectively. Solving Equation~\ref{eq:sig1} and \ref{eq:sig2} self consistently yields the $\zeta$-potential as well as the surface charge density as a function of the pH and the electrolyte concentration. Hence, in the non-linear least squares fitting of the conductance as a function of pH and concentration using Equation~\ref{eq:cond} the $\text{p}K_a$, $\text{p}K_b$ and pI are fitting parameters and thus directly obtained.

\begin{figure*}
 \centering
 \includegraphics{etching_charact.png}
 \caption{(a) Nanopore fabrication process using the track etch technique. (i) The a-\ch{SiO2} membrane is irradiated with swift heavy ions (Au ions), creating damage in the material. (ii) The damage is etched using hydrofluoric acid, forming conical nanopores. (b-f) Structural characterisation using scanning electron microscopy (SEM), atomic force microscopy (AFM) and small angle X-ray scattering (SAXS). (b) SEM: Cross-section of a nanopore from a different membrane, fabricated under the same conditions. (c) AFM: High resolution image of a nanopore. (d) SEM: Plan-view of a nanopore. (e-f) SAXS: (e) 2D scattering image and (f) fit to the data of a different membrane, fabricated under identical conditions.}
 \label{f:charact}
\end{figure*}

\section{Results \& discussion}
\subsection{Nanopore fabrication}
The nanopores were created in \SI{1}{\um} thick, $55\times\SI{66}{\um\tothe{2}}$ a-\ch{SiO2} windows using the track etch technique,\cite{Hadley2018} which is schematically shown in Figure~\ref{f:charact}(a). First, the a-\ch{SiO2} windows were irradiated with \SI{2.2}{\GeV} \ch{^{197}Au} ions at the Universal Linear Accelerator UNILAC (GSI Helmholtz Centre for Heavy Ion Research Darmstadt, Germany) with a fluence of \SI{e6}{\text{ions }\cm\tothe{-2}} (i). When passing through the material, the ions generate a narrow cylindrical damage region along their path.\cite{Kluth2008} These so-called ion tracks are more susceptible to chemical etching than the undamaged material. After irradiation, the membrane was taped to a silicon wafer using Kapton tape and immersed in \SI{2.5}{\percent} hydroflouric acid at room temperature, which removes material along the track thus at a higher rate than the surrounding matrix (ii).\cite{Hadley2020} This process creates highly uniform conical nanopores in the thin a-\ch{SiO2} windows. To stop the etching, the membranes were rinsed with and stored in demonised water until they were characterised.

\begin{figure*}
 \centering
 \includegraphics{setup.png}
 \caption{Conductometric nanopore experiments: Scheme of the setup with a negatively charged nanopore membrane. Due to the negative surface charge, there are more cations than anions transported through the pore. In the positive case (left), the pore is ion depleted, representing the low conductance state. For negative voltages (right), the concentration inside the pore is increased, corresponding to the high conductance state.}
 \label{f:setup}
\end{figure*}

With this fabrication technique, we are able to manufacture nanopore membranes with a wide range of different morphologies. By varying the thickness of the a-\ch{SiO2} layer, nanopores with lengths between \SIrange{200}{1000}{\nm} can be created. By combining a variable irradiation fluence between \SIrange{e6}{e9}{\text{ions }\cm\tothe{-2}} and window sizes ranging from $30\times30$ to $700\times\SI{700}{\um\tothe{2}}$, membranes containing between 10 to 5,000,000 nanopores can be achieved. Single ion irradiation leading to a single pore is also possible.\cite{Guo2008} The half-cone angle can be tuned between \SIrange{10}{18}{\degree} by using different irradiation energies, and adjusting the etching conditions.\cite{Hadley2019}

Here, we are presenting a detailed structural characterisation and the ionic transport properties of conical nanopores in an a-\ch{SiO2} membrane. Further descriptions of the experiments are given in the SI.

\subsection{Structural characterisation}
Scanning electron microscopy (SEM) is a useful tool to estimate the pore base radius, number of pores and pore distribution across the nanopore membrane. Figure~\ref{f:charact}(b) and (d) show a cross-section and a plan-view of a conical nanopore. To acquire a cross-section, the membrane is broken in half. As this is a destructive technique, Figure~\ref{f:charact}(b) is from a different membrane fabricated under identical conditions. From the SEM data, we conclude that the membrane contains 16 nanopores with an average minimum distance to the neighbouring pore of \SI{7.8(46)}{\um} (see SI, Figure~S1 and S2) and a pore base radius of \SI{169(7)}{\nm}. The spacing of the nanopores is sufficient to rule out any meaningful contributions of inter-pore interactions.\cite{Cao2018}

The base radius of the pores can also be determined using atomic force microscopy (AFM). As presented in Figure~\ref{f:charact}(c), AFM provides a high resolution image of the nanopore, from which a base radius of \SI{158.3(26)}{\nm} is obtained. The difference in base radius compared to the SEM measurements might be due to the difficulty in defining the edge of the pore in either measurement technique and limited resolution. For more information, see the SI.

Using ellipsometry and surface profiling, the membrane thickness and hence the pore length was determined to \SI{710(5)}{\nm}, indicating a thinning down from the original thickness of \SI{1}{\um} by almost \SI{300}{\nm} during the etching process. Due to the interference of the ellipsometry laser with the nanopores, the thickness of the membrane could not determined directly by ellipsometry only. Thus, the step between an un-etched area of the membrane was compared to the etched area using surface profiling.

To gain precise measurements of the cone angle of the nanopores, synchrotron-based small angle X-ray scattering (SAXS) was performed at the SAXS/WAXS beamline at the Australian Synchrotron (Melbourne, Australia) with an X-ray energy of \SI{12}{\keV}. By tilting the membrane with respect to the X-ray beam and analysing the change in scattering pattern, the cone angle of the pores can be determined. This measurement has been performed using a different membrane that was fabricated under identical conditions irradiated with a fluence of \SI{e8}{\text{ions }\cm\tothe{-2}} to obtain a sufficiently high SAXS signal. It can be assumed that the etching process and the SAXS measurements are unaffected by the difference in fluence, as in both cases the pore overlap is negligible.\cite{Kluth2008b} Figure~\ref{f:charact}(e) shows the 2D scattering image with the characteristic x-wing pattern and oscillations in intensity for a tilt angle of \SI{41}{\degree}. By performing a fit of the 2D scattering data (Figure~\ref{f:charact}(f)) to our theoretical model we find that the half-cone angle of the nanopores is \SI{12.6(1)}{\degree} (more SAXS measurements are presented in the SI, Figure~S3). A detailed explanation of the measurement and data analysis technique is given by Hadley \textit{et al}.\cite{Hadley2018}

Utilising the structural characterisation using the different measurement techniques, we can predict the tip radius of the nanopore $r\ind{t}$ using the relation
\begin{align}
    r\ind{t}=r\ind{b}-L\tan\vartheta
\end{align}
where $r\ind{b}$ is the base radius, $L$ is the length, and $\vartheta$ is the half-cone angle of the nanopore. The tip radius calculated by this method varies between \SIrange{0}{11}{\nm} due to the uncertainties determining the base radius using AFM and SEM (a more comprehensive analysis is given in the SI). It is important to note that the cone angle determined by SAXS has an uncertainty of only \SI{.1}{\degree} and thus does not contribute significantly to this. Conductometry measurements however will provide a better measure for the tip radius, which is presented in the following section.

\begin{figure}
    \begin{minipage}{.5\textwidth}
        \includegraphics{iv.png}
    \end{minipage
    \begin{minipage}{.5\textwidth}
        \includegraphics{G_ph.png}
        \includegraphics{sc_ph.png}
    \end{minipage}
  \caption{(a) $I-V$ curves in \SI{100}{\mymmol} \ch{KCl} for the pH series in acidic and basic conditions. (b) Experimental membrane conductance (symbols) including fit to Equation~\ref{eq:cond} (lines) for the pH series at a concentration of \SI{100}{\mymmol}. The conductance is normalised by the electrolyte conductivity, as the conductivity slightly varies with pH (inset). (c) Calculated surface charge densities as a function of pH for different concentrations for our nanopore system. The surface charge densities were calculated using the experimentally obtained $\text{p}K_a$, $\text{p}K_b$ and pI values and Equation~\ref{eq:sig1} and \ref{eq:sig2}.}
  \label{f:ph}
\end{figure}

\subsection{Ion transport and surface properties}
The ionic transport characteristics of the nanopores were analysed as a function of electrolyte concentration and pH conditions. The measurements were conducted by inserting the nanopore membrane between two compartments, which are filled with a potassium chloride (\ch{KCl}) solution at concentrations ranging from \SIrange{.1}{1000}{\mymmol} and pH values between \numlist{1.8;10.1}{}. The pH was adjusted by adding \ch{HCl} or \ch{KOH}. Using \ch{Ag}/\ch{AgCl} electrodes on either side of the membrane, we measured the current-voltage ($I-V$) characteristics of the pores between \SIlist{-1;1}{\V} to determine the membrane conductance and ion current rectification (ICR). The conductance was determined in the linear regime of the $I-V$ curve around \SI{0}{\V} between \SI{-.1}{\V} and \SI{.1}{\V}. The convention for conical nanopore experiments is that the polarity of the voltage is determined by the electrode at the cone base, as shown in Figure~\ref{f:setup}.

In a charged nanopore, the concentration of counter-ions to the surface charge is greatly increased and thus the majority of the ionic current is carried by them. As the electric field in the tip region of a conical nanopore is greatly increased, transport of majority charge carriers from tip to base is promoted and a large ionic current is observed. This case is called the high conductance state. If the polarity of the electric field is reversed, transport is hindered, which is referred to as the low conductance state.

Figure~\ref{f:ph}(a) shows the $I-V$ curves for the pH series. In acidic conditions, the high conductance state of the membrane occurs at positive voltages, indicating a positive surface charge which is the opposite in basic conditions, indicating a negative surface charge. In either case, the high conductance state is strongly dependent on the pH, while the low conductance state is almost unaffected. In the high conductance state, the ionic current is dominated by surface effects, indicating a large change in surface charge with varying pH. As in the low conductance state the current is dominated by bulk behaviour, the ionic current is almost unaffected by changes in pH.

Figure~\ref{f:ph}(b) shows the membrane conductance as a function of pH. The symbols are our measurements and the solid line represents a fit to Equation~\ref{eq:cond}. The membrane conductance is normalised by the electrolyte conductivity as it changes slightly with pH (inset). The minimum conductance occurs at a pH of 4.5, at which the surface charge density reaches \SI{0}{\V\m\tothe{-2}} as plotted in Figure~\ref{f:ph}(c). Figure~\ref{f:ph}(c) shows the surface charge densities that are calculated using the experimentally obtained $\text{p}K_a$, $\text{p}K_b$ and pI values and Equation~\ref{eq:sig1} and \ref{eq:sig2}. At the point of zero surface charge density, which is the isoelectric point pI, the pores only exhibit bulk current behaviour. In more acidic conditions, the surface becomes positively charged and in more basic conditions the pore becomes negatively charged.

\begin{figure}
    \begin{minipage}{.5\textwidth}
        \includegraphics{G_c.png}
    \end{minipage
    \begin{minipage}{.5\textwidth}
        \includegraphics{sc_c.png}
    \end{minipage}
  \caption{(a) Experimental membrane conductance (symbols) including fit to Equation~\ref{eq:cond} (lines) for the concentration series for three different pH values, and pH as a function of concentration (inset). (b) Calculated surface charge densities as a function of concentration for different pH values for our nanopore system. The surface charge densities were calculated using the experimentally obtained $\text{p}K_a$, $\text{p}K_b$ and pI values and Equation~\ref{eq:sig1} and \ref{eq:sig2}.}
  \label{f:concentration}
\end{figure}

\begin{table}
  \caption{Debye length $\lambda\ind{D}$ (calculated using Equation~\ref{eq:sig2}) for different electrolyte concentrations. Extension of the EDL through the nanopore at the pore tip indicated by the ratio of Debye length to tip radius $\lambda\ind{D}/r\ind{t}$.}
  \label{t:debye}
  \begin{tabular}{lll}
    \hline
    Concentration, $c$ [\SI{}{\mymmol}]  & Debye length, $\lambda\ind{D}$ [\SI{}{\nm}]  & $\lambda\ind{D}/r\ind{t}$ [$\%$]  \\
    \hline
    0.1 & 30.8 & 540 \\
    1 & 9.72 & 171 \\
    10 & 3.07 & 54 \\
    100 & 0.97 & 17 \\
    1000 & 0.31 & 5.4 \\
    \hline
  \end{tabular}
\end{table}

Figure~\ref{f:concentration}(a) shows the membrane conductance as a function of electrolyte concentration for three pH values. The symbols are our measurements and the solid line the fit to Equation~\ref{eq:cond}. At a pH of 3.6, the surface is positively charged, at a pH of 5.7, the pores are slightly negatively charged and at a pH of 10.1, the pores are strongly negatively charged, which is reflected in Figure~\ref{f:concentration}(b). At high concentrations, the overall conductance is dominated by bulk behaviour, as the Debye lengths becomes smaller (see Table~\ref{t:debye}). The Debye length describes the screening length of the surface charge; a reduced Debye length is correlated to a thinner electrical double layer (EDL). At lower concentrations, where the slope of the conductance changes, surface effects start to dominate over bulk behaviour.

By parallel analysis and non-linear least squares fitting of the pH and concentration dependent membrane conductance with Equation~\ref{eq:cond}, the $\text{p}K_a$, $\text{p}K_b$ and pI values as well as pore size can be determined. We obtain a pore size of \SI{5.7(1)}{\nm}. This is well within the range of the pore size determined by the structural characterisation. The $\text{p}K_a$, $\text{p}K_b$ and pI are \num{7.6(1)}, \num{1.5(2)} and \num{4.5(1)} respectively, demonstrating that nanopores in track etched a-\ch{SiO2} exhibit similar properties to a-\ch{SiO2} nanoparticles and nanochannels, for which $\text{p}K_a$, $\text{p}K_b$ and pI values of 6.6~--~8, 0~--~2 and <~5 respectively have been reported.\cite{VanDerHeyden2005,Wang2010,Andersen2011,Yeh2013,Barisik2014}

\subsection{Ionic current rectification}
Ionic current rectification (ICR) is an important characteristic of (asymmetric) nanopores in which the membrane exhibits a directional preference for transport of charged species. ICR can be achieved by different means, such as by a varying surface charge density along the nanopore,\cite{Daiguji2005} asymmetries in the electrolyte,\cite{Hsu2018} or geometry of the pores such as our conical nanopores. ICR is defined as the ratio between the current in the high conductance state to the low conductance state:
\begin{equation}
    \text{ICR} =
    \begin{cases}
    \left|\frac{I\left(\SI[retain-explicit-plus]{+1}{\V}\right)}{I\left(\SI{-1}{\V}\right)}\right|&\text{if pH}<\text{pI}\\
    \left|\frac{I\left(\SI{-1}{\V}\right)}{I\left(\SI[retain-explicit-plus]{+1}{\V}\right)}\right|&\text{if pH}>\text{pI}
    \end{cases}
\end{equation}

\begin{figure}
    \begin{minipage}{.5\textwidth}
        \includegraphics{rect_ph.png}
    \end{minipage
    \begin{minipage}{.5\textwidth}
        \includegraphics{rect_c.png}
    \end{minipage}
  \caption{Ionic current rectification (ICR) as a function of (a) pH at a concentration of \SI{100}{\mymmol} and (b) concentration for three different pH values. The dashed line indicates a rectification ratio of 1, i.e. no rectification and a symmetric current.}
  \label{f:icr}
\end{figure}

Figure~\ref{f:icr} shows the ICR of our membrane as a function of pH and concentration. The rectification ratio peaks at around 10 in acidic conditions at a pH between 2 and 3 at concentrations between \SIrange{10}{100}{\mymmol}, corresponding to surface charge densities of \SIrange{.03}{.04}{\coulomb\m\tothe{-2}}. This behaviour was theoretically predicted by Tseng \textit{et al}.;\cite{Tseng2016} In the high conductance state, when the surface charge is low, an increase in surface charge will cause a large increase in the concentration of ions within the pore and thus the current. Conversely, in the low conductance state, the concentration of ions barely increases by increasing the surface charge and thus the current remains almost constant. This effect can be observed in our measurement. Figure~\ref{f:ph}(a) shows a large change in the high conductance state between pH values of 4.5 to 2.3, whereas the low conductance state is almost stable, thus ICR increases. However, when the surface charge is increased further, the concentration and thus current saturates in the high conductance state. In the low conductance state, the concentration and thus current will increase significantly. We observe this effect when adjusting the pH from 2.3 to 1.8, and hence ICR decreases. Thus for any given pore geometry, ICR will have a maximum value at a certain surface charge density, which is \SIrange{.03}{.04}{\coulomb\m\tothe{-2}} in our nanopore system.

\section{Conclusions}
We presented a detailed characterisation of conical nanopores in a-\ch{SiO2} that were fabricated using the track etch technique. The geometrical structure of the nanopore membrane was characterised using SAXS, AFM, SEM, ellipsometry, and surface profiling. The multipore membrane used in this research contains 16 nanopores with tip radii of \SI{5.7(1)}{\nm}. We determined the important surface parameters $\text{p}K_a$, $\text{p}K_b$ and pI, which are \num{7.6(1)}, \num{1.5(2)} and \num{4.5(1)} respectively, which is in good agreement to those from other \ch{SiO2} systems. The maximum ICR was determined to be around 10 at pH 2.3. It is important to note that these measurements have been performed with a multipore system. Frequently, characterisations are performed using single nanopores, and scaling those to multipores can lead to a significant loss in performance.\cite{Cao2018,Wang2021} ICR is an extremely important property of nanopore systems, as ICR enables the development of innovative applications, as well as improving the performance of non-rectifying membranes. ICR has been utilised to create new biosensors,\cite{Cai2015a,Perez-Mitta2018} as well as demonstrate superior performance in power generation.\cite{Li2019,Laucirica2021} Electroosmotic pumps (EOP) that operate in AC mode have also been developed.\cite{Wu2016} As the performance of such a pump is proportional to the opening angle of the pore, we estimate that our system has the potential to outperform the best AC-EOP by an order of magnitude.\cite{Wu2016}

a-\ch{SiO2} offers a platform that is much thinner with larger cone angles and thus higher throughput than polymers, while being more resistant to temperature and chemicals. It also provides the capabilities of readily integration in lab-on-a-chip devices. Additionally, a-\ch{SiO2} is well suited for chemical surface functionalisation through simple silane chemistry,\cite{Abdelsamad2018,Sanz-Perez2018,Cashin2018,Karnati2019} allowing further tuning of the transport characteristics, which can be well utilised due to the large surface area of the pore walls. It also opens up new surface modification techniques that are readily available for a-\ch{SiO2} but are lacking for other materials,\cite{Graf2012,Tanaka2013,Eggenberger2019b} potentially enabling applications with significantly enhanced performance to currently established techniques. This nanopore system thus provides a new versatile platform for the development of advanced integratable sensor and separation systems.
\begin{acknowledgement}
P.K. acknowledges financial support from the Australian Government through the Australian Research Council under the ARC Discovery Project Scheme (DP180100068). Part of this research was undertaken at the SAXS/WAXS beamline at the Australian Synchrotron, part of ANSTO. The irradiated a-\ch{SiO2} membranes are part of the experiment UMAT, which was performed at the beam line X0 at the GSI Helmhotzzentrum für Schwerionenforschung, Darmstadt (Germany) in the frame of FAIR Phase-0. This work used the ACT node of the NCRIS-enabled Australian National Fabrication Facility (ANFF-ACT).
\end{acknowledgement}

\begin{suppinfo}
The following file is available free of charge: "Supporting Information: Number of pores and average minimum distance; Small angle X-ray scattering analysis; Atomic force microscopy analysis; Pore tip radius calculation (PDF)".
\end{suppinfo}

\section*{Conflicts of interest}
There are no conflicts of interest to declare.


\section{Introduction} \label{sec:intro}

Protostars and their surrounding disks are formed through the gravitational collapse of dense molecular cloud cores.
Protostars eventually evolve into main-sequence stars via the main accretion phase, which is the most dynamic stage in the star formation process due to the presence of active gas inflow and ejection.
The balance between the two processes (gas inflow and ejection) directly determines the mass of protostars and disks, and thus observational investigations of the inflow/outflow motions are fundamental subjects in star formation studies.
Because molecular outflows play the most significant role in transporting both the gas mass and a large amount of angular momentum originating from the parental molecular cloud cores,
it is important to observe the detailed structure of outflows to verify star formation theory.

Molecular outflows are universally observed around protostars across the Local Group of galaxies (\citealt{Tokuda2022} and references therein), and their physical characteristics, such as momentum and force, are diverse and somewhat depend on the protostellar luminosity \citep[e.g.,][]{bontemps1996,Beuther2002,wu2004}.
Outflows interact with the surrounding gas from the parental core scale to the molecular cloud scale, and their impact on star-forming regions has been discussed \citep[e.g.,][]{lada1985,fukui1993,matzner2000,maclow2004,arce2007,pudritz2019}.
According to recent high-resolution millimeter and sub-millimeter observations toward the solar neighborhood targets, a common feature is relatively low-velocity flows with a wide opening angle.
In addition, a few sources exhibit high-velocity ($\sim$100\,km\,s$^{-1}$) collimated flows \citep[e.g.,][]{bachiller1996,hirano2010,matsushita2019}.
Magnetohydrodynamic (MHD) simulations predict that, unlike the classical  jet-entrainment scenario, a magnetocentrifugal force drives the outflow directly from the rotating circumstellar disk for the whole range of protostellar masses  \citep[e.g.,][]{machida2013,matsushita2017,commercon2022}.
Some observations have reported strong evidence for the directly driven scenario \citep[e.g.,][]{bjerkeli2016,hirota2017,matsushita2019}.
Although these observations provide excellent evidence to constrain the outflow driving mechanism, their projected characteristics in the plane of the sky are highly sensitive to various factors, such as the evolutionary stage, the initial conditions of gravitational collapse \citep[e.g.,][]{hirano2020,machida2020,tsukamoto2020}, and the inclination angles for the targets.
Hence, a case-study characterization toward specific targets is still needed to further understand the outflow phenomena in the main accretion phase.

There is a lack of detailed studies observing outflows driven from protostellar systems with small inclination angles (hereafter, pole-on outflows).
Thus, it is crucial to observe nearly face-on systems because this allows us to look into regions close to the protostars \citep[e.g.,][]{motogi2013,motogi2016,motogi2017,motogi2019,fernandez_lopez2020}.
More massive protostars should be suitable targets for such observations because they have larger disks and more powerful outflows \citep[e.g.,][]{wu2004}.
In particular, outflows appearing around more massive stars are larger and have a fairly wide range of velocity \citep[e.g.,][]{matsushita2017}.
However, there are only a few high-mass stars within a few hundred parsecs of the Sun.
It is thus reasonable to observe intermediate-mass protostellar systems in the solar neighborhood to spatially resolve pole-on outflows.

Recently, highly complex gas structures around protostars have been revealed by Atacama Large Millimeter/submillimeter Array (ALMA) high-resolution studies.
Molecular line observations reported asymmetric, arc-like gas structures around low-mass protostellar sources \citep[e.g.,][]{tokuda2014,tokuda2018} owing to complex gas dynamics.
Although the origin of such peculiar structures is still under debate and depends on source to source, one of the interpretations is a non-axisymmetric accretion flow onto protostars, called $``$streamers$"$ \citep[][and references therein]{pineda2022}.
\cite{okoda2021} discovered a secondary outflow with a direction perpendicular to the main outflow around a single Class~0 protostar IRAS~15398-3359.
These observations indicate that a classical picture does not apply to some protostellar systems.
Thus, in addition to investigating outflow activities, characterizing complex envelope structures can also be an important approach to exploring the diversity of star formation processes.

IRAS~12496-7650, also known as the Herbig Ae star DK~Cha, is the most luminous IRAS source in the Chamaeleon~II star-forming region \citep{hughes1989,hughes1991}.
Early observations discovered a molecular outflow associated with DK~Cha.
A single-dish study by \citet{knee1992} reported a very high-velocity blueshifted ($|v_{\rm LSR}-v_{\rm sys}| \sim 70$\,km\,s$^{-1}$) $^{12}$CO\,($J$ = 1--0) emission, which is most likely an outflow component from protostellar objects.
\citet{van_kempen2009} and \citet{yildiz2015} revealed an overlap of outflow between blueshifted and redshifted lobes by the Atacama Pathfinder EXperiment (APEX) observations with a beam size of $\gtrsim 8''$, and concluded that the system is in a nearly face-on configuration.
However, the detailed structure of the outflow is unclear due to the lack of angular resolution in previous studies.
As described in Sections \ref{sec:obs}--\ref{sec:discussion}, we attempted to spatially resolve the outflow based on ALMA archival data for DK~Cha, but the high-resolution view provided peculiar and complex gas structures with an arc or crescent-shaped morphology in the high-velocity emission that forced us to reconsider the simple outflow interpretation.

In this paper, we report the results of our analysis of archival data from ALMA observations toward DK~Cha.
Section~\ref{sec:obs} describes the ALMA observations and data reduction.
In Section~\ref{sec:results}, we present the results for continuum, $^{12}$CO\,($J$ = 2--1) and $^{13}$CO\,($J$ = 2--1) emissions.
We discuss the interpretation of the oddly shaped outflow revealed by $^{12}$CO and the arc-like structures revealed by $^{13}$CO in Section~\ref{sec:discussion}.
Our conclusions are presented in Section~\ref{sec:conclusions}.

\section{Observations and Target descriptions} \label{sec:obs}

We used the ALMA archival data (project ID: 2019.1.01792.S), which was obtained in Cycle~7 in Band~6 (230\,GHz, 1.3\,mm).
The project targeted 125 protostars in nearby star-forming regions.
The observations toward our target DK Cha centered at ($\alpha_{\rm ICRS}$, $\delta_{\rm ICRS}$) = (12$^{\rm h}$53$^{\rm m}$17$^{\rm s}$.20, $-77^\circ 07'$10\farcs00) were carried out on 2019 October 30 and November 5, using the ALMA main array in its C43-3 configuration.
Two spectral windows targeted $^{12}$CO and $^{13}$CO\,($J$ = 2--1) with a frequency resolution of 61.035\,kHz
and bandwidths of 117\,MHz (1920 channels) and 59\,MHz (960 channels), respectively.
Another spectral window was used for continuum observations with an aggregated bandwidth of 1.875\,GHz.

The data were processed with the Common Astronomy Software Application (CASA) package \citep{casa2022} version 5.6.1-8.
We used the \textit{``tclean''} task in the imaging process with the \textit{``multi-scale''} deconvolver to recover the extended emission.
We applied the \textit{``natural''} weighting with an image grid of 0\farcs13 and velocity resolutions of 0.5\,km\,s$^{-1}$.
The synthesized beam size for both the continuum and $^{12}$CO was $\sim 1\farcs1 \times 0\farcs8 \simeq 270\,{\rm au} \times 200\,{\rm au}$ at the distance of DK~Cha \citep[$243.7\pm22.0$\,pc,][]{gaia2021}.
The (1$\sigma$) rms of the molecular line emission, $^{12}$CO\,($J$ = 2--1), and the continuum were 0.26\,K at velocity resolutions of 0.5\,km\,s$^{-1}$ and 2.1\,mJy beam$^{-1}$, respectively.

DK~Cha has a protostellar mass of 1.4--2$\msun$ \citep{spezzi2008,villenave2021}, a bolometric luminosity of 24--35.4\,$L_\odot$ \citep{spezzi2008,van_kempen2010,kristensen2012,yang2018}, a bolometric temperature of 569--592.0\,K \citep{kristensen2012,yang2018}, and a systemic velocity $v_{\rm sys}$ of 2--4\,km\,s$^{-1}$ \citep{van_kempen2009,kristensen2012,yildiz2013}.
The evolutionary stage of this object is categorized as Class~I or II \citep{alcala2008,wampfler2013,yang2018}.

\section{Results} \label{sec:results}

\subsection{Continuum Source and $^{12}$CO High-velocity Emission} \label{sec:12co}

We show the 1.3\,mm continuum and $^{12}$CO\,($J$ = 2--1) emission in this subsection.
The white contours in the left panel of Figure~\ref{fig:rgb} show the 1.3\,mm continuum emission.
The emitting region is compact, comparable to the beam size.
A 2D Gaussian fit to the image gave a deconvolved size of ($503\pm23$\,mas)$\times$($306\pm22$\,mas) and a position angle of $128.8\pm5.3^\circ$.
The total flux is $562.4\pm5.4$\,mJy.
These values are consistent with those reported by \citet{villenave2021}, who used other ALMA archival data with a higher angular resolution of $0\farcs51\times0\farcs28$.
The cyan and red colors represent the blueshifted and redshifted $^{12}$CO\,($J$ = 2--1) integrated intensity distributions, respectively.
The right panels of Figure \ref{fig:rgb} show the average spectra of blueshifted (top) and redshifted (bottom) components.
We defined the $^{12}$CO integration ranges of the maps as follows; the high-velocity sides are the velocity at which the $^{12}$CO emission is prominently detected judging from the averaged profiles, and we excluded the lower-velocity range around the systemic velocity of $\sim$3\,km\,s$^{-1}$ \citep{yildiz2013} with our $^{13}$CO detection, likely containing the infalling envelope around the protostar (see Section~\ref{sec:13co}). The blueshifted wing of the $^{12}$CO spectrum extends from $<-4$\,km\,s$^{-1}$ ~to $-71$\,km\,s$^{-1}$, and the redshifted component also has high-velocity emission (7.5--55\,km\,s$^{-1}$).
The blueshifted components have arc-like structures with a size of several thousand astronomical units, and they surround the continuum source and have a stripe pattern.
In particular, the arc-like structure close to the continuum source resembles a crescent moon.
The redshifted components also show a similar stripe pattern.

\begin{figure*}[htbp]
\centering
\includegraphics[width=180mm]{./rgb_spectrums_v3.pdf}
\caption{
Structure of DK Cha (IRAS 12496-7650) outflow revealed by ALMA.
(Left) Blueshifted and redshifted $^{12}$CO integrated intensity distributions plotted with the 1.3\,mm continuum emission.
The cyan and red colors show the distributions of the blueshifted ($-71$--$-4$\,km\,s$^{-1}$) and redshifted (7.5--55\,km\,s$^{-1}$) components, respectively.
We used only emissions above $3\sigma$ for each pixel.
The systemic velocity is $\simeq 3$\,km\,s$^{-1}$, which was determined by single-dish C$^{18}$O observations \ \citep[e.g.,][]{yildiz2013}.
The white contours show the 1.3\,mm continuum emission with 10 and $100 \sigma$, where $1\sigma$ is the 2.1\,mJy beam$^{-1}$.
The white ellipse at the lower left corner indicates the ALMA synthesized beam; $1\farcs06 \times 0\farcs82$ with a position angle of $-27^\circ$.
(Right) Average spectra of the $>3 \sigma$ blueshifted (top) and redshifted (bottom) components.
The blue and orange lines represent the spectra of $^{12}$CO and $^{13}$CO, respectively.
The $^{13}$CO intensity is multiplied by a factor of 3 for visualization purposes.
The blue-filled areas indicate the integrated velocity ranges.
\label{fig:rgb}}
\end{figure*}

To investigate whether the crescent-shaped structure is an interferometric artifact, i.e., due to the missing flux, we compared our data with the data from a single-dish telescope. Using the 15\,meter Swedish-ESO Submillimeter Telescope, \citet{knee1992} showed that the $^{12}$CO\,($J$ = 1--0) high-velocity emission is less than $\sim 0.1$\,K at a velocity of $-20$\,km\,s$^{-1}$ with an angular resolution of $\sim 40''$.
We measured the CO brightness temperature across the entire field of view ($\sim 40'' \times 40''$) at $-20$\,km\,s$^{-1}$ in our data and confirmed that the brightness temperature in our data is consistent with that in  \citet{knee1992}.
Thus, the CO crescent-shaped structure seen in the high-velocity component is not likely to be an overemphasized feature due to the interferometric effect.
As mentioned in Section~\ref{sec:intro}, recent high-resolution molecular gas observations have reported peculiar structures associated with protostars, such as streamers and dynamical interactions among multiple sources.
They are mainly identified in dense gas tracers, e.g., C$^{18}$O and HCO$^{+}$, and their relative velocities are close to the systemic velocity within a few km\,s$^{-1}$.
However, we identified the stripe pattern composed of the multiple arc-like structures in the low-density tracer of $^{12}$CO, and the velocities are too high to be explained by accretion motion.
We regard these components as outflow motions, as already suggested in the previous single-dish works \cite[e.g.,][]{knee1992}.
The shape deviates significantly from the usually identified conical-type feature and can probably be attributed to the viewing angle effect (i.e., close to the face-on configuration).
The interpretation and further discussion of the outflow will be given in Section~\ref{sec:outflow_model}.

\begin{figure*}
\includegraphics[width=180mm]{./12co_channel_moment0.pdf}
\caption{
$^{12}$CO velocity-channel maps toward DK Cha.
The color scale shows the integrated intensity for each channel.
The integrated velocity ranges are given in the upper part of each panel; the blue and red text indicate blueshifted and redshifted components, respectively (the white text indicates a velocity range that includes the systemic velocity).
The white contours show the 1.3\,mm continuum emission, and the orange ellipse in the lower left corner represents the synthesized beam size (same as Figure~\ref{fig:rgb}).
\label{fig:12co_channel}}
\end{figure*}

\begin{figure*}
\centering
\includegraphics[width=1.0\columnwidth]{./12co_moment1_0-134_157-252_v1.pdf}
\caption{
$^{12}$CO moment 1 maps toward DK Cha.
(Left) Moment 1 map of the blueshifted components (color).
The velocity range is $-71$--$-4$\,km\,s$^{-1}$.
We used only emissions above $3\sigma$ for each pixel.
The gray contours show the 1.3\,mm continuum emission, and the blue ellipse at the lower left corner represents the synthesized beam size (same as Figure~\ref{fig:rgb}).
(Right) As for the left panel, but for the redshifted components  ($7.5$--$55$\,km\,s$^{-1}$).
\label{fig:12co_mom1}}
\end{figure*}

Figure \ref{fig:12co_channel} shows velocity-channel maps of the $^{12}$CO emission in the range $-60$--30\,km\,s$^{-1}$.
The range of the velocity integration is 10\,km\,s$^{-1}$ for each channel.
The blueshifted high-velocity component ($\lesssim -40$\,km\,s$^{-1}$) has a crescent-shaped structure and is distributed slightly northeast of the continuum source.
The blueshifted low-velocity component ($-20 \lesssim v_{\rm LSR} \lesssim 0$\,km\,s$^{-1}$) has a similar shape but surrounds the continuum source, and the emitting region seems to be more extended than the high-velocity component.
The redshifted component ($\gtrsim 10$\,km\,s$^{-1}$) has a similar arc-like structure to the blueshifted one, with the opposite orientation.

To verify the characteristics of the outflow described above in more detail, we generated $^{12}$CO moment 1 maps for the blueshifted and redshifted components (Figure~\ref{fig:12co_mom1}).
The figure clearly shows the two-dimensional velocity structure/gradient of the outflow, especially for the blueshifted component.
A blueshifted compact high-velocity emission is located on the northeast side of the continuum source, while a more extended low-velocity emission is distributed on the opposite side, forming a layered velocity gradient across the crescent shape as a whole.

One of the densest regions ($A_V \sim 20$\,mag and $N_{\rm H_2} > 10^{22}$\,cm$^{-2}$) in the Chamaeleon~II cloud is located in the vicinity of DK~Cha \citep[e.g.,][]{alcala2008,alves_de_oliveira2014}.
Compared to the blueshifted outflow, the velocity gradient of the redshifted outflow is not clear.
In addition, the redshifted outflow velocity is slower than the  blueshifted outflow velocity.
Thus, DK~Cha seems to be in front of the dense region, and the redshifted components could be decelerated due to the interaction with the surrounding dense gas.

\subsection{$^{13}$CO Structures} \label{sec:13co}
\begin{figure*}
\centering
\includegraphics[width=0.9\columnwidth]{./13co_4pannel.pdf}
\caption{
Spatial and velocity structures of $^{13}$CO emission around DK Cha observed by ALMA.
(a)
Moment 1 map of the $>5\sigma$ emission (color).
The gray contours show the $^{13}$CO peak temperature map with 10, 25, 40, and 55$\sigma$, where 1$\sigma$ is 0.26\,K.
The black contours show the 1.3\,mm continuum emission, and the black ellipse at the bottom left corner is the beam size (same as Figure~\ref{fig:rgb}).
The black arrow indicates the direction of the PV diagram shown in panel (b).
(b)
PV diagram along the direction from northeast to southwest.
The white dashed line indicates a velocity of 3\,km\,s$^{-1}$, which is the systemic velocity for DK~Cha \citep[e.g.,][]{yildiz2013}.
The position with offset $= 0$ corresponds to the position of the protostar.
(c)
As for panel (a), but zoomed toward the continuum source.
The black arrow indicates the direction of the PV diagram shown in panel (d).
(d)
As for panel (b), but for the direction from northwest to southeast.
\label{fig:13co}}
\end{figure*}

Figure~\ref{fig:13co}~(a) plots the $^{13}$CO\,($J$ = 2--1) moment 1 and the overlaid peak temperature with the gray contours.
The $^{13}$CO image shows an envelope structure with a spatial extent of a few thousand au.
The strong emission on the northeast side is blueshifted ($\sim 1.5$\,km\,s$^{-1}$) and that on the southwest side is redshifted ($\sim 4.5$\,km\,s$^{-1}$).
This direction is similar to the expected outflow axis.
Figure~\ref{fig:13co}~(b) shows a position--velocity (PV) diagram along that direction; the offset $=0$ point corresponds to the position of the protostar.
The relative velocity tends to be higher in regions closer to the central protostar within $\pm 5''$ ($\sim 1200$\,au), indicating an infalling motion of the envelope gas (for details, see Section~\ref{sec:gas_motion}).

The black dashed lines in Figure~\ref{fig:13co}~(a) show that the $^{13}$CO emission exhibits arc-like structures.
The blueshifted ($\sim2$\,km\,s$^{-1}$) and redshifted ($\sim4$\,km\,s$^{-1}$) arcs extend to the northwest and northeast toward the continuum source and connect to the infalling envelope.
Both have a length of $\sim1000$\,au.
To further characterize the structures, we estimated their density and mass.
Assuming local thermodynamic equilibrium ($T=20$\,K), we can determine the $^{13}$CO column density using the following equation \citep{wilson2013},
\begin{equation}
    N_{\rm ^{13}CO} \approx 1.5\times10^{14}\frac{T ~e^{5.3/T} ~\int \tau_{\nu} \,{\rm d}v}{1-e^{-10.6/T}} ~{\rm cm^{-2}} ~.
\end{equation}
We obtain $N_{\rm ^{13}CO} = 1.6\times10^{15} \,{\rm cm^{-2}}$.
Assuming that the abundance ratio of $^{12}$CO to $^{13}$CO is 70 and the ratio of H$_2$ to $^{12}$CO is $10^4$ \citep{frerking1982}, we get a H$_2$ column density of $N_{\rm H_2} = 1.1\times10^{21}\,{\rm cm^{-2}}$ and arc mass of $M_{\rm H_2, arc} = 5.7\times10^{-4}\,M_\odot$.
We describe the interpretation of the arc-like structures in Section~\ref{sec:gas_motion}.

Figure~\ref{fig:13co}~(c) is a zoomed-in view of the vicinity of the continuum source, as indicated by the black rectangle in panel (a).
As indicated by the magenta dashed line, the $^{13}$CO emissions of velocities close to the systemic velocity have an S-shaped configuration.
For the continuum source, the velocity gradient extends from northwest to southeast and its extent is about 500\,au.
The direction of the velocity gradient corresponds to the major axis of the disk and is also perpendicular to the outflow axis and to the large-scale velocity gradient seen in panel (a).
Figure~\ref{fig:13co}~(d) shows a PV diagram along the arrow shown in panel (c).
There are emissions with relative velocities of $\gtrsim 3$\,km\,s$^{-1}$ in the region within $\pm 2''$ (corresponding to $\sim 500$\,au) of the continuum source.
The region with a negative offset (i.e., northwest of the disk) is blueshifted and the opposite side is redshifted.
The small-scale velocity gradient perpendicular to the outflow could trace the rotating motion of the disk or the envelope (see also Section~\ref{sec:gas_motion}).

The velocity structure provides information on the protostellar mass, although the angular resolution is not sufficiently high to determine it properly.
At an offset of $\pm$1\arcsec ($\sim$240\,au), the relative velocity is $\sim$2\,km\,s$^{-1}$ (see Figure~\ref{fig:13co}).
To produce such a high velocity at large radii by Keplerian rotation requires at least a 1\,$M_{\odot}$ source with a mass heavier than typical low-mass protostars.
This estimation gives a lower limit of the protostellar mass without considering the inclination angle, which is about a factor of 2 heavier in the case of close to face-on viewing.
The dynamically inferred mass is consistent with the mass estimated by \citet{spezzi2008} based on the position of DK~Cha in the HR diagram.

\section{Discussion} \label{sec:discussion}

\subsection{Interpretation of the Outflow Velocity Structure} \label{sec:outflow_model}

Numerous observational studies have reported outflows, most of which are nicely shaped bipolar flows when viewed nearly edge-on.
It is difficult to spatially resolve the radial velocity distribution within an outflow in such objects because the observed outflow velocity decreases as the line-of-sight direction approaches edge-on.
In addition, it is also difficult to investigate the internal velocity structure of an outflow when viewed close to edge-on.
We observed the DK~Cha outflow from nearly pole-on and could clearly detect its spatial velocity structure, as shown in the Figures~\ref{fig:rgb}--\ref{fig:12co_mom1}.
In this section, we discuss the three-dimensional velocity structure of the DK~Cha outflow based on the observed velocity gradient in the plane of the sky.

The spatial distribution of the $^{12}$CO emission seen in Figures~\ref{fig:rgb}--\ref{fig:12co_mom1} is highly complicated.
Thus, it is difficult to guess the origin of the emission from the morphology alone.
However, as mentioned in Section~\ref{sec:12co}, their typical velocities are much faster than the speed of sound at 10\,K ($\sim 0.2$\,km\,s$^{-1}$), and their complex structures can only be attributed to outflow origin.
Since it is significantly difficult to reproduce blueshifted and redshifted emissions surrounding the continuum source in a typical edge-on view of the outflow, we interpreted the CO emission as a pole-on view of the outflow.
Note that previous studies already suggested that the DK~Cha outflow is observed nearly pole-on \citep{van_kempen2009, yildiz2015}.

\subsubsection{Comparison with Another Pole-on Outflow}
Before discussing the outflow structure of DK~Cha, we compare the DK~Cha outflow with another pole-on outflow.
\citet{fernandez_lopez2020} reported that the Class~II star DO~Tau has a similar outflow structure in the same $^{12}$CO\,($J$ = 2--1) emission line as our detected outflow structure.
They identified ring-shaped outflows with three different radii and velocities.
Based on the disk inclination angle ($i=19^\circ$) and other factors, they interpreted these structures to be a pole-on view of the outflow.
The ring-like structures of DO~Tau are closer to a perfect circle than the crescent-shaped structures of DK~Cha.
This difference may be attributed to the inclination angle, and we expect that the inclination angle of DO~Tau is smaller than that of DK~Cha.
The radii of the rings of DO~Tau range from 220 to 800\,au, slightly smaller than for DK~Cha.
The velocities of the DO~Tau outflow are $-10$--8\,km\,s$^{-1}$.
DK~Cha is considered to be younger than DO~Tau.
The physical properties of DK~Cha, such as the outflow emission, velocity, and spatial scale, are greater than those of DO~Tau.
Thus, DK~Cha could be a more suitable object for observing outflow-driven protostellar systems from nearly face-on directions and for discussing the spatial velocity structure of the outflow.

\subsubsection{Three-dimensional Outflow Structure}
In the following, we discuss which model could reasonably explain the spatial velocity structure of the outflow observed in the CO emission.
As described in Section~\ref{sec:12co}, the redshifted component is likely to interact with the surrounding gas, resulting in a complicated structure.
On the other hand, the blueshifted component has a relatively simple velocity structure.
Thus, we focused only on the velocity structure of the blueshifted outflow (see the left panel of Figure~\ref{fig:12co_mom1}).

A simple model proposed by \citet{lee2000} is often used to interpret the outflow velocity structure emerging on the PV diagram.
Their model describes the outflow as a parabolic surface with a velocity structure that accelerates along the outflow axis.
The model appears to explain well the outflow velocity structure on the PV diagram along the outflow axis, while it is not obvious that the model can explain the spatial velocity structure in the plane of the sky.
We, therefore, present a simplified three-dimensional illustration that provides an overview of the velocity structure in the left panels in Figure~\ref{fig:outflow}.
We assume continuous acceleration, while for simplicity we represent the outflow as being composed of three different velocities (orange for the low-, green for the intermediate-, and blue for the high-velocity component).
The lower left panel of Figure~\ref{fig:outflow} clearly shows that the high-velocity component has a more extended structure than the low-velocity component in the plane of the sky.
Figures~\ref{fig:12co_channel} and \ref{fig:12co_mom1} show that the low-velocity component surrounds the high-velocity component, which is the opposite to what is observed for the model reported by \citet{lee2000}.
Thus, it is difficult to reproduce our results with the vertical acceleration model.
Note that we do not mean that outflows are not actually accelerating along the outflow axis.

Another possible approach is to examine the horizontal velocity structure of the outflow (or the velocity distribution in the plane perpendicular to the outflow axis, not along the outflow surface).
We consider the horizontal velocity gradient model, in which the gas in the inner regions flows outward at higher velocity (Figure~\ref{fig:outflow} right panels).
If we observe such an outflow from a direction close to pole-on, a layered velocity structure should appear, as shown in the lower right panel of Figure~\ref{fig:outflow}.
In addition, the high-velocity component is expected to be more compact than the low-velocity one.
The velocity structure of the observed outflow in the left panel of Figure~\ref{fig:12co_mom1} has a similar layered velocity gradient, with a compact high-velocity component surrounded by an extended low-velocity component.
In the panel, the missing part of the ellipse could be due to interactions with the ambient gas, lack of sensitivity outside the observation area, or other factors.
Therefore, our observations reveal that outflows with different velocities are driven from different radii.
Such a velocity structure can be naturally reproduced by an outflow directly driven by the magnetocentrifugal mechanism \citep[e.g.,][]{machida2014,machida2019}.

\begin{figure*}
\centering
\includegraphics[width=0.8\columnwidth]{./outflow_illust_v3.pdf}
\caption{
Schematic view of the outflow driven from the protostar.
(Left) Model of an outflow gradually accelerating along the outflow axis.
The orange-, green-, and blue-filled regions have low-, intermediate-, and high-velocity components, respectively.
For simplicity, only three different velocities are shown in the figure.
The dark gray sphere and gray region represent the central protostar and circumstellar disk, respectively.
(Right) Model of an outflow with a horizontal velocity gradient.
\label{fig:outflow}}
\end{figure*}

\subsection{Outflow Launching Regions}
The outflow driving mechanism is still under debate.
There are two main scenarios.
In one, the outflow is produced by ambient gas receiving momentum from the high-velocity jet \citep[e.g.,][]{arce2007}.
On the other, the outflow is driven directly from the circumstellar disk by the magnetocentrifugal mechanism irrespective of the appearance of the jet \citep[e.g.,][]{machida2014}.
Recent ALMA observations have supported the latter.
For example, \citet{bjerkeli2016} reported that the TMC-1A outflow is driven from the outer edge of the disk.
A clear signature of rotation could be detected in the bipolar outflow of Orion Source I \citep{hirota2017}. The large angular momentum of the outflow indicates that the outflow is driven far from the central protostar.
Note that the outflow driven from the region close to the central star cannot have a large angular momentum (or rapid rotation).
\citet{matsushita2019} discovered an extremely high-velocity flow and outflow around MMS~5 in the Orion Molecular Cloud~3, and found that their axes are misaligned, whereas if the low-velocity flow is entrained by the high-velocity flow, their axes should be aligned.

Here, based on the directly driven outflow scenario, we estimate the driving radius from the observed outflow velocities shown in Figures~\ref{fig:rgb}--\ref{fig:12co_mom1}.
Classical theoretical studies \citep[e.g.,][]{mestel1961,mestel1968} have shown that the terminal velocity of the outflow (or disk wind) roughly corresponds to the Keplerian velocity at its launching radius.
Thus, we simply assume that the observed outflow velocity $v_{\rm out}$ agrees with the Keplerian velocity $v_{\rm K}$ at each launching radius $r_0$,
\begin{equation}
    v_{\rm out} \sim v_{\rm K} = \sqrt{\frac{G M_{\rm star}}{r_0}}.
    \label{eq:vout}
\end{equation}
With equation~(\ref{eq:vout}), the outflow launching radius $r_0$ can be described as
\begin{equation}
    r_0 \sim G M_{\rm star}\, v^{-2}_{\rm out}
    = 0.7 \,{\rm au} \left( \frac{M_{\rm star}}{2\msun} \right)
        \left( \frac{v_{\rm out}}{50\,\rm km\,s^{-1}} \right)^{-2},
\label{eq:r0}
\end{equation}
where we have used a protostellar mass $M_{\rm star}$ of $2\msun$ \citep{spezzi2008}.
As shown in Figures~\ref{fig:rgb}--\ref{fig:12co_mom1}, the outflow of DK~Cha has crescent-shaped structures across the low-velocity ($< 5$\,km\,s$^{-1}$) to the high-velocity ($> 50$\,km\,s$^{-1}$) components.
The outflow launching region extends over two orders of magnitude ($\sim 0.7$--70\,au) if these outflow components with different velocities are driven directly from their respective radii.
Note that the driving radius depends somewhat on the Alfvén radius (i.e., the intensity of the magnetic field and ram pressure).
Thus, there is uncertainty in estimating the launching radius within a factor of $\lesssim 10$
   \citep[e.g.,][]{pudritz1986,koenigl1993,kudoh1997ApJ,pudritz2019}.
Therefore, the inner ($\sim0.7$\,au) and outer ($\sim 70$\,au) launching radii can be changed according to the extent of the Alfvén radius.
However, the large extent of the outflow driving region (over two orders of magnitude in radius) would not change significantly, because the outflow velocity at each shell (see, Figure~\ref{fig:outflow} right panels) is primarily determined by the Keplerian velocity at each launching radius \citep{kudoh1997ApJ,Kudoh1997b,Machida2008} and the difference in the outflow velocity ($\sim5-50$\,km\,s$^{-1}$) gives the difference in the launching radius proportional to the outflow velocity (see, eq.~[\ref{eq:r0}]).

Considering the conservation of the (specific) angular momentum ($j = r_{\rm out} v_{\rm rot} = \sqrt{G M_{\rm star} r_0}$), it is valuable to estimate the rotational velocity of the outflow $v_{\rm rot}$,
\begin{equation}
  v_{\rm rot} = 0.4\,{\rm km\,s^{-1}} \left( \frac{r_{\rm out}}{1000\,\rm au} \right)^{-1}
    \left( \frac{M_{\rm star}}{2\msun} \right)^{0.5} \left( \frac{r_0}{70\,\rm au} \right)^{0.5},
\end{equation}
where $r_{\rm out}$ is the observed outflow radius (the half width of the outflow lobe).
Thus, the rotational velocity of the outflow is clearly less than the velocity resolution in this observation.
Since the outflow rotational velocity becomes smaller due to the inclination angle, it is natural that we could not detect any sign of outflow rotation.

\subsection{Rotating Infalling Envelope and Streamer} \label{sec:gas_motion}

In this subsection, we discuss the gas motion expected from the $^{13}$CO\,($J$ = 2--1) emission.
As described in Section~\ref{sec:13co}, two velocity gradients around DK~Cha are detected in the $^{13}$CO emission (Figure~\ref{fig:13co}), one perpendicular and one parallel to the outflow axis.
Relative velocities seem to be higher in regions closer to the central protostar.
This velocity structure is similar to the infalling and rotating gas motion reported in recent ALMA observations \citep[e.g.,][]{aso2015,sakai2016,yen2017}.
In particular, the velocity structure (moment 1 map) of HL~Tau \citep[][Figure~1]{yen2017} is very similar to our results (Figure~\ref{fig:13co}~(a))
in that, both sources have a 1000\,au-scale envelope gas, velocity gradients parallel and perpendicular to the outflow axis, and an S-shaped structure with the gas having velocities close to the systemic velocity in the $^{13}$CO\,($J$ = 2--1) emission.
Thus, it seems that the $^{13}$CO emission has traced the rotating infalling envelope.

We can also confirm the existence of $^{13}$CO arc-like structures in Figure~\ref{fig:13co}~(a).
There is no sign of a binary star in DK~Cha and thus the structure is unlikely to be the result of gravitational interactions in a multiple system \citep{matsumoto2015} like MC27/L1521F \citep{tokuda2014,tokuda2016}.
Rather, it is more natural to interpret these structures as non-axisymmetric accretion flows toward the central protostellar system since these are connected to the rotating infalling envelope described above.
In other words, we expect that the structures are the same phenomenon as the streamers recently observed \citep[][and references therein]{pineda2022}.
Among Class~I objects, streamers have been detected in HL~Tau and Per-emb-50 with lengths of 520 and 3000\,au, respectively \citep{yen2019,valdivia2022}.
The streamers detected in DK~Cha have a similar size ($\sim$1000\,au) to these objects.
Our observations may be a case in which the rotating infalling envelope and the streamers were detected simultaneously.
HL~Tau, Per-emb-50, and DK~Cha are all intermediate-mass protostars ($\sim 2\msun$). Therefore, it is interesting to investigate whether streamers are associated with a broader range of protostellar mass.
In addition, since shock tracers such as SO have been detected together with streamers \citep{garufi2022}, it will be important to observe different molecular emission lines for DK~Cha.

\section{Conclusions} \label{sec:conclusions}
We have analyzed the ALMA archival data toward the intermediate-mass protostar DK~Cha in the Chamaeleon~II star-forming region.
Our results are summarized as follows.
\begin{enumerate}
    \item A $^{12}$CO\,($J$ = 2--1) emission was detected in the very high-velocity outflow ($|v_{\rm LSR}-v_{\rm sys}| \ge 70$\,km\,s$^{-1}$) driven by DK Cha, which exhibits a $\sim$3000\,au-scale crescent-shaped structure surrounding the 1.3\,mm continuum source.
    The outflow has a layered velocity gradient; the lower-velocity component is located southwest toward the continuum peak, and the higher-velocity component is shifted northeastward.
    These observations revealed the spatially resolved velocity structure of the pole-on outflow.
    \item We considered two models to explain the velocity structure of the CO outflow revealed in this study.
    One is to interpret the observed velocity structure as a vertical acceleration of the outflow.
    The other interprets the observed velocity structure as a horizontal velocity gradient of the outflow.
    Based on the fact that the high-velocity component is more compact than the low-velocity one, the latter model is more plausible to explain the velocity gradient of the outflow observed in the CO emission.
    Furthermore, based on the directly driven outflow scenario, we clarified the outflow driving region from the observed outflow velocities.
    The results suggest that the driving region extends over two orders of magnitude ($\sim 0.7$--70\,au).
    \item We detected two different velocity gradients in the $^{13}$CO\,($J$ = 2--1) emission.
    One is a 500\,au-scale compact velocity gradient around the protostar from northwest to southeast, which is perpendicular to the expected axis of the $^{12}$CO outflow.
    The other is a 2500\,au-scale velocity gradient extending from northeast to southwest, parallel to the expected outflow axis.
    The relative velocity $|v_{\rm LSR}-v_{\rm sys}|$ is $> 3$\,km\,s$^{-1}$ and tends to be higher in regions closer to the central protostar.
    Considering the directions of the gradients and the acceleration toward the protostar, the $^{13}$CO emission traces the rotating infalling envelope.
    In addition, the $^{13}$CO emission shows two arc-like structures.
    One has a blueshifted central velocity of $\sim 2$\,km\,s$^{-1}$ and extends to the northwest toward DK~Cha.
    The other has a redshifted central velocity of $\sim 4$\,km\,s$^{-1}$ and extends to the northeast.
    Both have a length of $\sim 1000$\,au.
    Since these structures are connected to the infalling envelope, we concluded that the arc-like structures correspond to non-axisymmetric accretion flows/streamers, often reported in recent years.
\end{enumerate}
DK~Cha has the potential to become a reasonable template for understanding the characteristics of face-on protostellar systems, as it allows us to simultaneously observe various phenomena, such as a crescent-shaped outflow, a rotating infalling envelope, and streamers.
It is expected that future wide-field and deep observations of DK~Cha will help us to further understand the inner and outer structures in more detail.

\begin{acknowledgments}
We would like to thank the anonymous referees for their useful comments that we applied to improve our manuscript. This paper makes use of the following ALMA data: ADS/JAO. ALMA\#2019.1.01792.S. ALMA is a partnership of ESO (representing its member states), the NSF (USA), and NINS (Japan), together with the NRC (Canada), MOST, ASIAA (Taiwan), and KASI (Republic of Korea), in cooperation with the Republic of Chile. The Joint ALMA Observatory is operated by the ESO, AUI/NRAO, and NAOJ. This work was supported by a NAOJ ALMA Scientific Research grant (No. 2022-22B), Grants-in-Aid for Scientific Research (KAKENHI) of the Japan Society for the Promotion of Science (JSPS; grant Nos. JP17H06360, JP17K05387, JP17KK0096, JP21K13962, JP21H00049, JP21K03617, and JP21H00046).
\end{acknowledgments}

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\software{CASA \citep[v5.6.1-8;][]{casa2022}, Astropy \citep{astropy2018}}