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| "argon" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e6", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtered sample", | |
| "sputtered sample", | |
| "2-inch magnetron sputtered sample", | |
| "deposited sample" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e5" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e0" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e7" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a2", | |
| "entity": "e6" | |
| } | |
| ] | |
| }, | |
| { | |
| "label": "hb1_multilayered", | |
| "@graph": [ | |
| { | |
| "@type": "Entity", | |
| "@id": "e0", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "Metglas 2605HB1M", | |
| "2605HB1M", | |
| "HB1" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:length_diameter": [ | |
| { | |
| "@value": "2 inch", | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e1", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "SiO2 substrate", | |
| "SiO2" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e2", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "Cr", | |
| "Chromium" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e7", | |
| "type": [ | |
| { | |
| "@value": "tool", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "Edwards 2-inch magnetron sputtering system", | |
| "2-inch magnetron sputtering system", | |
| "magnetron sputtering system", | |
| "sputtering system" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a0", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtering", | |
| "sputtering", | |
| "2-inch magnetron sputtering", | |
| "depositing" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:pressure": [ | |
| { | |
| "@value": "4 mTorr", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:atmosphere": [ | |
| { | |
| "@value": [ | |
| "Ar", | |
| "argon" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:length_thickness": [ | |
| { | |
| "@value": "50 nm", | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e3", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtered sample", | |
| "sputtered sample", | |
| "2-inch magnetron sputtered sample", | |
| "deposited sample" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a0", | |
| "entity": "e1" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a0", | |
| "entity": "e2" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a0", | |
| "entity": "e7" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a0", | |
| "entity": "e3" | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e4", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "Aluminum oxide", | |
| "Al2O3" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a1", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtering", | |
| "sputtering", | |
| "2-inch magnetron sputtering", | |
| "depositing" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:pressure": [ | |
| { | |
| "@value": "4 mTorr", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:atmosphere": [ | |
| { | |
| "@value": [ | |
| "Ar", | |
| "argon" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e5", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtered sample", | |
| "sputtered sample", | |
| "2-inch magnetron sputtered sample", | |
| "deposited sample" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e3" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e4" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e7" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a1", | |
| "entity": "e5" | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a2", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtering", | |
| "sputtering", | |
| "2-inch magnetron sputtering", | |
| "depositing" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:pressure": [ | |
| { | |
| "@value": "4 mTorr", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:atmosphere": [ | |
| { | |
| "@value": [ | |
| "Ar", | |
| "argon" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e6", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "magnetron sputtered sample", | |
| "sputtered sample", | |
| "2-inch magnetron sputtered sample", | |
| "deposited sample" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e5" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e0" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e7" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a2", | |
| "entity": "e6" | |
| } | |
| ] | |
| } | |
| ] |