| [ | |
| { | |
| "label": "InSe_thickness_ratio_and_annealing", | |
| "@graph": [ | |
| { | |
| "@type": "Entity", | |
| "@id": "e1", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "In", | |
| "Indium" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e2", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "Se", | |
| "Selenium" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e3", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "glass substrate", | |
| "clean glass substrate" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e6", | |
| "type": [ | |
| { | |
| "@value": "tool", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "thermal evaporation coating unit", | |
| "evaporation coating unit", | |
| "coating unit" | |
| ], | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a1", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "thermal evaporation", | |
| "evaporation", | |
| "evaporating", | |
| "depositing", | |
| "deposition" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:atmosphere": [ | |
| { | |
| "@value": "vacuum", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:pressure": [ | |
| { | |
| "@value": "10⁻⁶ mbar", | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e1" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e2" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e3" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e6" | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e4", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": [ | |
| "thermal evaporated sample", | |
| "evaporated sample", | |
| "deposited sample" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:length_thickness": [ | |
| { | |
| "@value": "2500 Å", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:form": [ | |
| { | |
| "@value": "bilayer thin film", | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a1", | |
| "entity": "e4" | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a2", | |
| "label": [ | |
| { | |
| "@value": "annealing", | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:temperature": [ | |
| { | |
| "@value": [ | |
| "70", | |
| "100 °C" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e5", | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ], | |
| "label": [ | |
| { | |
| "@value": "annealed sample", | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e4" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a2", | |
| "entity": "e5" | |
| } | |
| ] | |
| } | |
| ] |