| [ | |
| { | |
| "label": "Cu2S_thin-film", | |
| "@graph": [ | |
| { | |
| "@type": "Entity", | |
| "@id": "e1", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "glass", | |
| "glasses" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e2", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "KrF excimer laser", | |
| "excimer laser", | |
| "Lamda Physik COMPexPro 201", | |
| "COMPexPro 201" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "type": [ | |
| { | |
| "@value": "tool", | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e3", | |
| "label": [ | |
| { | |
| "@value": "chamber", | |
| "@language": "en" | |
| } | |
| ], | |
| "type": [ | |
| { | |
| "@value": "tool", | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e4", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "grown sample", | |
| "pulsed laser deposited sample", | |
| "deposited sample" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Entity", | |
| "@id": "e5", | |
| "label": [ | |
| { | |
| "@value": "annealed sample", | |
| "@language": "en" | |
| } | |
| ], | |
| "type": [ | |
| { | |
| "@value": "material", | |
| "@language": "en" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a1", | |
| "label": [ | |
| { | |
| "@value": [ | |
| "growing", | |
| "pulsed laser deposition (PLD)", | |
| "pulsed laser deposition", | |
| "PLD", | |
| "deposition", | |
| "depositing" | |
| ], | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:temperature": [ | |
| { | |
| "@value": "350 °C", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:atmosphere": [ | |
| { | |
| "@value": [ | |
| "argon gas", | |
| "argon" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:pressure": [ | |
| { | |
| "@value": "0.5 Pa", | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Activity", | |
| "@id": "a2", | |
| "label": [ | |
| { | |
| "@value": "annealing", | |
| "@language": "en" | |
| } | |
| ], | |
| "matprov:temperature": [ | |
| { | |
| "@value": "350 °C", | |
| "@type": "xsd:string" | |
| } | |
| ], | |
| "matprov:duration": [ | |
| { | |
| "@value": [ | |
| "30 minutes", | |
| "30 min" | |
| ], | |
| "@type": "xsd:string" | |
| } | |
| ] | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e1" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e2" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a1", | |
| "entity": "e3" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a1", | |
| "entity": "e4" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e4" | |
| }, | |
| { | |
| "@type": "Usage", | |
| "activity": "a2", | |
| "entity": "e3" | |
| }, | |
| { | |
| "@type": "Generation", | |
| "activity": "a2", | |
| "entity": "e5" | |
| } | |
| ] | |
| } | |
| ] |