[
  {
    "label": "Cu2S_thin-film",
    "@graph": [
      {
        "@type": "Entity",
        "@id": "e1",
        "label": [
          {
            "@value": [
              "glass",
              "glasses"
            ],
            "@language": "en"
          }
        ],
        "type": [
          {
            "@value": "material",
            "@language": "en"
          }
        ]
      },
      {
        "@type": "Entity",
        "@id": "e2",
        "label": [
          {
            "@value": [
              "KrF excimer laser",
              "excimer laser",
              "Lamda Physik COMPexPro 201",
              "COMPexPro 201"
            ],
            "@language": "en"
          }
        ],
        "type": [
          {
            "@value": "tool",
            "@language": "en"
          }
        ]
      },
      {
        "@type": "Entity",
        "@id": "e3",
        "label": [
          {
            "@value": "chamber",
            "@language": "en"
          }
        ],
        "type": [
          {
            "@value": "tool",
            "@language": "en"
          }
        ]
      },
      {
        "@type": "Entity",
        "@id": "e4",
        "label": [
          {
            "@value": [
              "grown sample",
              "pulsed laser deposited sample",
              "deposited sample"
            ],
            "@language": "en"
          }
        ],
        "type": [
          {
            "@value": "material",
            "@language": "en"
          }
        ]
      },
      {
        "@type": "Entity",
        "@id": "e5",
        "label": [
          {
            "@value": "annealed sample",
            "@language": "en"
          }
        ],
        "type": [
          {
            "@value": "material",
            "@language": "en"
          }
        ]
      },
      {
        "@type": "Activity",
        "@id": "a1",
        "label": [
          {
            "@value": [
              "growing",
              "pulsed laser deposition (PLD)",
              "pulsed laser deposition",
              "PLD",
              "deposition",
              "depositing"
            ],
            "@language": "en"
          }
        ],
        "matprov:temperature": [
          {
            "@value": "350 °C",
            "@type": "xsd:string"
          }
        ],
        "matprov:atmosphere": [
          {
            "@value": [
              "argon gas",
              "argon"
            ],
            "@type": "xsd:string"
          }
        ],
        "matprov:pressure": [
          {
            "@value": "0.5 Pa",
            "@type": "xsd:string"
          }
        ]
      },
      {
        "@type": "Activity",
        "@id": "a2",
        "label": [
          {
            "@value": "annealing",
            "@language": "en"
          }
        ],
        "matprov:temperature": [
          {
            "@value": "350 °C",
            "@type": "xsd:string"
          }
        ],
        "matprov:duration": [
          {
            "@value": [
              "30 minutes",
              "30 min"
            ],
            "@type": "xsd:string"
          }
        ]
      },
      {
        "@type": "Usage",
        "activity": "a1",
        "entity": "e1"
      },
      {
        "@type": "Usage",
        "activity": "a1",
        "entity": "e2"
      },
      {
        "@type": "Usage",
        "activity": "a1",
        "entity": "e3"
      },
      {
        "@type": "Generation",
        "activity": "a1",
        "entity": "e4"
      },
      {
        "@type": "Usage",
        "activity": "a2",
        "entity": "e4"
      },
      {
        "@type": "Usage",
        "activity": "a2",
        "entity": "e3"
      },
      {
        "@type": "Generation",
        "activity": "a2",
        "entity": "e5"
      }
    ]
  }
]