自己整合ゲートを開発したのは誰
The self-aligned gate design was patented in 1969 by the team of Kerwin, Klein, and Sarace.
It was independently invented by Robert W. Bower (U.S. 3,472,712, issued October 14, 1969, filed October 27, 1966). The Bell Labs Kerwin et al. patent 3,475,234 was not filed until March 27, 1967, several months after R. W. Bower and H. D. Dill had published and presented the first publication of this work at the International Electron Device Meeting, Washington, D.C. in 1966.
Kerwin, Klein, and Sarace