Since the world has become industrialized, as a consequence, there is an increasing demand for gas sensors. Nanocrystalline diamond (NCD) films were grown on the commercially available sensor product consisted of a built-in microheater, a platinum temperature sensor, and a pair of Pt interdigitated electrodes using microwave plasma enhanced chemical vapor deposition process. We investigated the effect of fluorine- and hydrogen-terminated diamond surface on the gas sensing properties at room temperature. The gas sensing properties diamond-based sensor were measured by the changes of electrical resistance to various volatile organic compounds (C6H6, C3H6O, isopropylalcohol) and relative humidity. The comparative sensing performance of hydrogenated diamond surface shows improvement in sensitivity toward benzene, acetone, isopropylalcohol and humid air in contrast to fluorinated diamond surface, where the surface conductivity was suppressed. The sensor functionality was explained by the surface transfer doping effect.Keywords: diamond, gas sensor, response, sensitivity
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