- Cocks, F.H. and Pollock, J.T.A., The ion implantation of helium into gold. A combined X-ray reflection spectroscopy and Rutherford backscattering study,
Phys. Status Solidi A (East Germany), vol. 95 no. 1
pp. 141 - 8 .
(last updated on 2007/04/10)
Two methods are used to investigate the very near surface (0 to 10 nm) effect of 3 keV helium implantation into evaporated gold films. X-ray reflection spectroscopy is used to determine the change in density of the implanted layer and Rutherford backscattering to determine helium concentrations; a maximum of 3.3 He atoms per metal vacancy is reported for a fluence of 4.0×1016 atoms cm-2. The data support the proposition that for implant conditions below those required for exfoliation, there are helium pressures well in excess of 100 kbar within implantation induced voids
density of solids;gold;helium;ion implantation;metallic thin films;particle backscattering;vacancies (crystal);vacuum deposited coatings;voids (solid);X-ray reflection;