High Vacuum/High Pressure
In addition to other extreme environmental conditions such as high temperature, radiation levels and magnetic fields, Capacitec non-contact displacement sensors have been used in applications with high vacuum and pressure application condition.
Example of high pressure is the axial positioning of a shaft in a hydrogen turbo pump.
High vacuum applications: Ceramic wafer production in a clean Room
Typical High Vacuum/High Pressure Displacement Sensor Applications:
- Displacement measurements at - 240°C with high vacuum of 10-8 torr
- Particle accelerators
- Semiconductor Equipment
- Diesel fuel injectors
- Chemical Vapor Deposition (CVD)
- High vacuum and Cryogenic Processes