Fluidic driving device plays an important role in the delivery and distribution of minute amount of the liquid in the micro-fluidic system. Due to the unique advantages of simple structure, short response time, and low power consumption, piezoelectric actuation was employed to implement the microfluidic transportation. A piezoelectrically driven microfluidic device, piezoelectric pump, was developed and widely applied in many fields in last three decades. As a kind of displacement pump, piezoelectric pumps is able to realize accurate transportation of the liquid because of per stroke of output fluid is equal to the volumetric change of pumping chamber. And the output flow rate and pressure is easily to be controlled through adjusting the driving voltage or frequency. In this chapter, the design, structure, working principle and the characterisation of piezoelectric pumps with single chamber and multiple chambers are introduced.
Part of the book: Piezoelectric Actuators